HRXRD Lab.

Rigaku SmartLab High-Resolution X-Ray Diffraction

  • Water Cooled Cu rotary anode, 9kW X-ray power
  • Variable Tube current-voltage: 10-45 kV; 20-200 mA
  • Ge (220) x4 bounce monochromator
  • In-Plane, Out-Plane, RSM, Reflectivity GIXRD,
  • SAXS measurements
  • Special simulation programs (Global fit, 3D Explorer etc.) for epitaxial thin film measurements
  • Mapping
  • Ability to analyze complex device structures (laser, detector, transistor, etc.)