Hall Effect Measurement System
- Measurements: Hall Mobility Measurements, Hall Voltage Measurements, I-V Curve Measurements, Resistance Measurements, Magnetoresistance Measurements, Carrier Concentration Measurements, Four and Six Contact Resistance Measurements.
- The number of contacts 4 and 6.
- 4 contacts van der Pauw measurements; 10 mOhm – 10 MOhm Resistance Measurements (<2% measurement instability)
- Hall Bar measurements with 6 contacts; 10 mOhm – 10 MOhm Resistance Measurements (<2% measurement instability)
- Maximum Carrier Density measurement: 1 × 1020 cm – 3 Suitable for working at room temperature.
- It can work with 2 standard samples at the same time.
Unitemp-100 RTP System
- Various semiconductor processes, annealing, quality control, fast heat treatments, post-implantation annealing
- Fast heating with 18 infrared lamps
- Maximum temperature 1200 ° C
- Oven size: 504 x 504 (700) x 570 mm
- Process chamber made of quartz glass
- 50 programmed SPS process controller