Ellipsometer Lab.

OPT-S9000 Spectroscopic Ellipsometer

  • Film thickness, refractive index, dielectric constant, etc. measurement
  • Spectral range UV-VIS 250-1700 nm
  • Step scan analyzer for high speed
  • Widest variable angle (20 ° -90 °)
  • Light source: 75 W Xe Lamp
  • 160mm diameter height and inclination adjustable holder

ZeeScope Optical Profilometer

  • High resolution digital microscopy, accurate Z depth measurement, fast 3D acquisition and analysis, automatic depth composition, 3D surface metrology
  • 3D surface analysis in micrometer and nanometer range
  • ISO roughness and step heights measurements
  • Light source: Internal coaxial LED light source
  • Camera: 1 / 1.8 ” CCD 1616 x 1216 4.40 frame pixels, 12fps
  • Power supply: 110 / 220V AC
  • Measuring range: Ra, Rq: 0.01‐500µm
  • Measurement accuracy: ≤ ± 10%
  • Repeatability: ≤6%