3 December 2024

Ellipsometer is a measurement technique that measures the change in polarization of light during its reflection from a material. Spectroscopic ellipsometry provides information about the optical system that changes the polarization state of the incident polarized light. This technique is an important thin-film measurement technology due to its non-destructive and precise advantages. A temperature-dependent measurement setup is also available, allowing the study of the variation of the optical parameters of the sample with temperature.

Key Features:

• Provides information on film thickness, refractive index, extinction coefficient, etc.
• Spectral range: 250 – 1700 nm
• Step scanning analyzer for high-speed measurements
• Measurement range: 20° – 90°
• Adjustable angle steps: 5° ± 0.01°
• 75 W Xe Lamp light source
• Holder with adjustable height and tilt, 160 mm diameter
• Transparent film thickness range: 0 – 30000 nm
• Absorptive film thickness range: 0 – 30000 nm
• Samples are analyzed using the SE-900 fit program:
  • Material library with hundreds of material data
  • The SE-900 fit program includes models such as Cauchy, Sellmeier, Lorentz classical oscillator model, and Tauc-Lorentz model
• Accuracy of ellipsometric parameters: tg(ϕ) ≤ 0.01, cos(Δ) ≤ 0.0001
• Measurement variations of the samples at different times (month) in Delta (Δ) are ± 0.01°
• Temperature-dependent measurements are possible up to ≤ 400 °C.