9 December 2024

The Keithley 4200-SCS Semiconductor Characterization System is used for measuring semiconductor structures and devices, including DC I-V, C-V, and pulse characterization.

I-V Source Measurement Unit (SMU):

• Modules: ± 210 V / 100 mA or ± 210 V / 1 A
• Measurement Resolution: 100 fA, with an optional PreAmp providing 10 mA measurement resolution
• Frequency: Very low frequency capacitance from 10 mHz – 10 Hz

Measurements:

• Four Quadrant Operation: 2-wire or 4-wire connections for accurate measurement

C-V Multi-Frequency Capacitance Unit (CVU):

• AC Impedance Measurements: C-V, C-f, C-t
• Frequency Range: 1 kHz – 10 MHz
• DC Offset: ± 30 V (60 V differential) built-in DC bias
• Voltage Range: ± 210 V (420 V differential)
• Optional CVIV Multi-Switch: Allows easy switching between I-V and C-V measurements

Pulsed I-V Ultra-Fast Pulse Measurement Unit (PMU):

• Channels: Two independent or synchronized channels
• Sampling Rate: 200 MSa/s, with 5 ns sampling rate
• Voltage/Current: ± 40 V (80 Vp-p), ± 800 mA
• Features:
  • Transient waveform capture mode
  • Random waveform generator for multi-level pulse waveform with 10 ns programmable resolution

High Voltage Pulse Generator Unit (PGU):

• Channels: Two high-speed pulse voltage sources
• Voltage/Current: ± 40 V (80 Vp-p), ± 800 mA
• Pulse Waveform Generator: Random waveform generator for multi-level pulse waveform with 10 ns programmable resolution
• Segment ARB® Mode: For complex waveform generation

I-V / C-V Multi-Switch Module (CVIV):

• Easy Switching: Seamlessly switch between I-V and C-V measurements without reconnecting or removing the probes
• Voltage Routing: ± 210 V DC routing feature

Remote Pre-Amplifier / Switch Module (RPM):

• Automatic Switching: Automatically switches between I-V, C-V, and ultra-fast pulsed I-V measurements
• Extended Precision: Expands the existing precision of the 4225-PMU to tens of picoamps
• Reduced Cable Capacitance Effects: Minimizes the impact of cable capacitance on measurements

This system offers a comprehensive solution for semiconductor electrical characterization, providing high-speed and high-precision measurement capabilities for a wide range of semiconductor devices and materials.