Keithley 4200-SCS Semiconductor Characterization System

9 December 2024

It is used for measuring semiconductor structures and devices, including DC I-V, C-V, and pulse characterization.

  • I-V Source Measurement Unit (SMU):

±210 V / 100 mA or ±210 V / 1 A module, 100 fA measurement resolution, 10 mA measurement resolution with an optional PreAmp, and 10 mHz–10 Hz very low-frequency capacitance.

  • Measurements:

4-quadrant operation, 2 or 4-wire connection

  • C-V Multi-Frequency Capacitance Unit (CVU):

AC impedance measurements (C-V, C-f, C-t), 1 kHz–10 MHz frequency range, ±30 V (60 V differential) built-in DC polarity, ±210 V (420 V differential), and simple switching between I-V and C-V measurements with the optional CVIV Multi-Switch.

  • Pulsed I-V Ultra-Fast Pulse Measurement Unit (PMU):

Two independent or synchronized channels act as high-speed pulsed I-V sources and measurement units, offering 200 MSa/sec sampling at 5 ns, ±40 V (80 Vp-p), ±800 mA, transient waveform capture mode, and an arbitrary waveform generator for multi-level pulse waveforms with 10 ns programmable resolution.

  • High Voltage Pulse Generator Unit (PGU):

Two channel high-speed pulsed V source, ±40 V (80 Vp-p), ±800 mA, arbitrary waveform generator for multi-level pulse waveform with 10 ns programmable resolution Segment ARB® mode

  • I-V / C-V Multi-Switch Module (CVIV):

Easily switch between I-V and C-V measurements without reconnecting or removing probe needles, move C-V measurement to any terminal without reconnecting or removing probe needles, ±210 V DC forwarding capability

  • Remote Preamplifier/Switch Module (RPM):

Automatically switches between I-V, C-V, and ultra-fast pulsed I-V measurements, enhancing the 4225-PMU’s current sensitivity to tens of picoamps while minimizing the effects of cable capacitance.